Back ثلاثي فلوريد الكلور Arabic تری‌فلورید کولور AZB Trifluorur de clor Catalan Fluorid chloritý Czech Klortrifluorid Danish Chlortrifluorid German Τριφθοριούχο χλώριο Greek Trifluoruro de cloro Spanish تری‌فلورید کلر Persian Klooritrifluoridi Finnish

Chlorine trifluoride

Chlorine trifluoride
Skeletal formula of chlorine trifluoride with some measurements
Skeletal formula of chlorine trifluoride with some measurements
Spacefill model of chlorine trifluoride
Spacefill model of chlorine trifluoride
Names
Systematic IUPAC name
Trifluoro-λ3-chlorane[1] (substitutive)
Other names
Chlorotrifluoride
Identifiers
3D model (JSmol)
ChEBI
ChemSpider
ECHA InfoCard 100.029.301 Edit this at Wikidata
EC Number
  • 232-230-4
1439
MeSH chlorine+trifluoride
RTECS number
  • FO2800000
UNII
UN number 1749
  • InChI=1S/ClF3/c2-1(3)4 checkY
    Key: JOHWNGGYGAVMGU-UHFFFAOYSA-N checkY
  • InChI=1/ClF3/c2-1(3)4
    Key: JOHWNGGYGAVMGU-UHFFFAOYAB
  • F[Cl](F)F
  • [F-].[F-].F[Cl++]
Properties
ClF3
Molar mass 92.45 g·mol−1
Appearance Colorless gas or greenish-yellow liquid
Odor Sweet, pungent, irritating, suffocating[2][3]
Density 3.779 g/L[4]
Melting point −76.34 °C (−105.41 °F; 196.81 K)[4]
Boiling point 11.75 °C (53.15 °F; 284.90 K)[4] (decomposes at 180 °C, 356 °F, 453 K)
Reacts with water[1]
Solubility Soluble in carbon tetrachloride but explosive in high concentrations. Reacts with hydrogen-containing compounds e.g. hydrogen, methane, benzene, ether, ammonia.[1]
Vapor pressure 175 kPa
−26.5×10−6 cm3/mol[5]
Viscosity 91.82 μPa s
Structure
T-shaped molecular geometry
Thermochemistry[6]
63.9 J K−1 mol−1
281.6 J K−1 mol−1
−163.2 kJ mol−1
−123.0 kJ mol−1
Hazards
Occupational safety and health (OHS/OSH):
Main hazards
 Very toxic, very corrosive, powerful oxidizer, violent hydrolysis[3]
GHS labelling:
GHS03: Oxidizing GHS05: Corrosive GHS06: Toxic GHS08: Health hazard
Danger
NFPA 704 (fire diamond)
NFPA 704 four-colored diamondHealth 4: Very short exposure could cause death or major residual injury. E.g. VX gasFlammability 0: Will not burn. E.g. waterInstability 4: Readily capable of detonation or explosive decomposition at normal temperatures and pressures. E.g. nitroglycerinSpecial hazard W+OX: Reacts with water in an unusual or dangerous manner AND is oxidizer
4
0
4
W
OX
Flash point Noncombustible[3]
Lethal dose or concentration (LD, LC):
95 ppm (rat, 4 hr)
178 ppm (mouse, 1 hr)
230 ppm (monkey, 1 hr)
299 ppm (rat, 1 hr)
[7]
NIOSH (US health exposure limits):
PEL (Permissible)
 C 0.1 ppm (0.4 mg/m3)[3]
REL (Recommended)
 C 0.1 ppm (0.4 mg/m3)[3]
IDLH (Immediate danger)
 20 ppm[3]
Safety data sheet (SDS) [1]
Related compounds
Related compounds
 Chlorine pentafluoride
Chlorine monofluoride
Bromine trifluoride
Iodine trifluoride
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
checkY verify (what is checkY☒N ?)

Chlorine trifluoride is an interhalogen compound with the formula ClF3. It is a colorless, poisonous, corrosive, and extremely reactive gas that condenses to a pale-greenish yellow liquid, the form in which it is most often sold (pressurized at room temperature). It is famous for its extreme oxidation properties. The compound is primarily of interest in plasmaless cleaning and etching operations in the semiconductor industry,[8][9] in nuclear reactor fuel processing,[10] historically as a component in rocket fuels, and various other industrial operations owing to its corrosive nature.[11]

  1. ^ a b c "Chlorine trifluoride". PubChem Compound. National Center for Biotechnology Information. 4 July 2023. Retrieved 8 July 2023.
  2. ^ ClF3/Hydrazine Archived 2007-02-02 at the Wayback Machine at the Encyclopedia Astronautica.
  3. ^ a b c d e f NIOSH Pocket Guide to Chemical Hazards. "#0117". National Institute for Occupational Safety and Health (NIOSH).
  4. ^ a b c Haynes, William M., ed. (2011). CRC Handbook of Chemistry and Physics (92nd ed.). CRC Press. p. 4.58. ISBN 978-1-4398-5511-9.
  5. ^ Haynes, William M., ed. (2011). CRC Handbook of Chemistry and Physics (92nd ed.). CRC Press. p. 4.132. ISBN 978-1-4398-5511-9.
  6. ^ Haynes, William M., ed. (2011). CRC Handbook of Chemistry and Physics (92nd ed.). CRC Press. p. 5.8. ISBN 978-1-4398-5511-9.
  7. ^ "Chlorine trifluoride". Immediately Dangerous to Life or Health Concentrations (IDLH). National Institute for Occupational Safety and Health (NIOSH).
  8. ^ Habuka, Hitoshi; Sukenobu, Takahiro; Koda, Hideyuki; Takeuchi, Takashi; Aihara, Masahiko (2004). "Silicon Etch Rate Using Chlorine Trifluoride". Journal of the Electrochemical Society. 151 (11): G783–G787. Bibcode:2004JElS..151G.783H. doi:10.1149/1.1806391. Archived from the original on 2022-01-25. Retrieved 2017-04-11.
  9. ^ Xi, Ming et al. (1997) U.S. patent 5,849,092 "Process for chlorine trifluoride chamber cleaning"
  10. ^ Board on Environmental Studies and Toxicology, (BEST) (2006). Acute Exposure Guideline Levels for Selected Airborne Chemicals: Volume 5. Washington D.C.: National Academies Press. p. 40. ISBN 978-0-309-10358-9. (available from National Academies Press Archived 2014-11-07 at the Wayback MachineOpen access icon)
  11. ^ Boyce, C. Bradford and Belter, Randolph K. (1998) U.S. patent 6,034,016 "Method for regenerating halogenated Lewis acid catalysts"

Rich TVX News Network Site

Rich TVX News Network Info

© MMXXIII Rich X Search. We shall prevail. All rights reserved. Rich X Search