Fan filter unit

Filter ceiling grid of a cleanroom for microelectronic (semiconductor) manufacturing with filter fan units installed

A fan filter unit (FFU) is a type of motorized air filtering equipment. It is used to supply purified air to cleanrooms, laboratories, medical facilities or microenvironments by removing harmful airborne particles from recirculating air.^[1] The units are installed within the system's ceiling or floor grid. Large cleanrooms require a proportionally large number of FFUs, which in some cases may range from several hundred to several thousand.^[1]^[2] Units often contain their own pre-filter, HEPA filter and internally controllable fan air distribution.^[3]

^ ^a ^b Kohli, Rajiv; Mittal, Kashmiri L. (2009). Developments in surface contamination and cleaning - particle deposition, control and removal. William Andrew. p. 164. ISBN 978-1-4377-7830-4.
^ "Building and Environment: Performance of large fan-filter units for cleanroom applications". Building and Environment. 42. ScienceDirect: 2299–2304. doi:10.1016/j.buildenv.2006.05.007.
^ Pennwell (Mar 2007). CleanRooms. Vol. 21. pp. 16–17. ISSN 1043-8017. Retrieved 26 October 2011.

[Kohli2009-1] Kohli, Rajiv; Mittal, Kashmiri L. (2009). Developments in surface contamination and cleaning - particle deposition, control and removal. William Andrew. p. 164. ISBN 978-1-4377-7830-4.

[ScienceDirect2011-2] "Building and Environment: Performance of large fan-filter units for cleanroom applications". Building and Environment. 42. ScienceDirect: 2299–2304. doi:10.1016/j.buildenv.2006.05.007.

[CleanRooms2007-3] Pennwell (Mar 2007). CleanRooms. Vol. 21. pp. 16–17. ISSN 1043-8017. Retrieved 26 October 2011.

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