Plasma cleaning

Plasma cleaning is the removal of impurities and contaminants from surfaces through the use of an energetic plasma or dielectric barrier discharge (DBD) plasma created from gaseous species. Gases such as argon and oxygen, as well as mixtures such as air and hydrogen/nitrogen are used. The plasma is created by using high frequency voltages (typically kHz to >MHz) to ionise the low pressure gas (typically around 1/1000 atmospheric pressure), although atmospheric pressure plasmas are now also common.^[1]

^ Evgeny V. Shun’ko & Veniamin V. Belkin (2007). "Cleaning Properties of atomic oxygen excited to metastable state 2s²2p⁴(¹S₀)". J. Appl. Phys. 102 (8): 083304–1–14. Bibcode:2007JAP...102h3304S. doi:10.1063/1.2794857.

[Shun'ko-1] Evgeny V. Shun’ko & Veniamin V. Belkin (2007). "Cleaning Properties of atomic oxygen excited to metastable state 2s²2p⁴(¹S₀)". J. Appl. Phys. 102 (8): 083304–1–14. Bibcode:2007JAP...102h3304S. doi:10.1063/1.2794857.

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