Nanoelectromechanical systems

A die shot (after metallization/ IC interconnect removal) of the digital die of the SiTime SiT8008, a programmable oscillator reaching quartz precision with high reliability and low g-sensitivity. The nanoscale transistors and nanoscale mechanical components (on a separate die) are integrated on the same chip package.^[1]

Nanoelectromechanical systems (NEMS) are a class of devices integrating electrical and mechanical functionality on the nanoscale. NEMS form the next logical miniaturization step from so-called microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and chemical sensors. The name derives from typical device dimensions in the nanometer range, leading to low mass, high mechanical resonance frequencies, potentially large quantum mechanical effects such as zero point motion, and a high surface-to-volume ratio useful for surface-based sensing mechanisms.^[2] Applications include accelerometers and sensors to detect chemical substances in the air.

^ "SiTime SiT8008 - MEMS oscillator : Weekend die-shot : ZeptoBars".
^ Hughes, James E. Jr.; Ventra, Massimiliano Di; Evoy, Stephane (2004). Introduction to Nanoscale Science and Technology (Nanostructure Science and Technology). Berlin: Springer. ISBN 978-1-4020-7720-3.

[1] "SiTime SiT8008 - MEMS oscillator : Weekend die-shot : ZeptoBars".

[Ventra2004-2] Hughes, James E. Jr.; Ventra, Massimiliano Di; Evoy, Stephane (2004). Introduction to Nanoscale Science and Technology (Nanostructure Science and Technology). Berlin: Springer. ISBN 978-1-4020-7720-3.

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